1:1 internal mode coupling strength in GaAs doubly-clamped MEMS beam resonators with linear and nonlinear oscillations - 文章详情页

作者：

Zhang, Ya (Zhang, Ya.) (学者：张永安) | Yoshioka, Yuri (Yoshioka, Yuri.) | Morohashi, Isao (Morohashi, Isao.) | Liu, Xin (Liu, Xin.)

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EI Scopus SCIE

摘要：

We　have　investigated　the　1:1　internal　mode　coupling　strength　in　a　GaAs　doubly-clamped　MEMS　beam　resonator　by　thermally　tuning　the　frequencies　of　two　neighbored　resonant　modes.　The　anti-crossing　of　the　resonant　frequencies　indicates　that　the　two　modes　couple　with　each　other,　and　the　mode　coupling　strength　was　estimated　by　the　splitting　of　the　anti-crossed　frequencies　of　the　two　modes.　When　the　oscillation　amplitudes　were　tuned　from　the　weakly-driven　linear　regime　to　the　strongly-driven　nonlinear　regime,　we　observed　slightly　increased　frequency　splitting,　indicating　that　the　nonlinear　oscillation　only　makes　a　very　small　contribution　to　the　mode　coupling　strength.　©　2020　The　Japan　Society　of　Applied　Physics.

关键词：

Oscillators (mechanical) Resonators Natural frequencies III-V semiconductors Crystal resonators Semiconducting gallium Gallium arsenide

作者机构：

[ 1 ] [Zhang, Ya]Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo; 184-8588, Japan
[ 2 ] [Yoshioka, Yuri]Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo; 184-8588, Japan
[ 3 ] [Morohashi, Isao]National Institute of Information and Communications Technology, 4-2-1 Nukui-Kitamachi, Tokyo Koganei; 184-8795, Japan
[ 4 ] [Liu, Xin]Beijing-Dublin International College, Institute of Theoretical Physics, Beijing University of Technology, 100 Pingleyuan, Beijing; 100124, China

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