This　paper　studies　a　new　type　of　miniature　planar　induction　heater　through　simulation.　The　miniature　plane　induction　heater　consists　of　a　metal　heating　plate,　a　glass　slide　and　a　plane　coil.　The　metal　micro　heating　plate　is　designed　with　a　cavity　of　a　specific　size.　Since　the　cavity　contains　residual　gas,　when　the　micro　heating　plate　is　heated,　hot　bubbles　will　be　generated　in　the　cavity　better　and　faster.　Through　the　analysis　of　the　energy　density,　eddy　current　density,　and　temperature　distribution　of　the　metal　micro　heating　plate,　it　is　found　that　the　cavities　play　a　very　good　role　in　the　concentration　of　eddy　current　and　the　increase　of　energy.　This　kind　of　micro　planar　induction　heater　can　be　used　for　various　hot　bubbles　to　drive　micro　execution　devices,　such　as　micro　ejectors,　micro　mixers　and　micro　pumps.　©　Published　under　licence　by　IOP　Publishing　Ltd.