Silicon-based　MEMS　techniques　are　very　popular　for　the　manufacture　of　micro　parts.　Only　a　limited　number　of　materials　can　be　processed　by　these　techniques.　As　the　rapid　development　of　Selective　Laser　Sintering(SLS)　in　laser　rapid　prototyping　field　almost　any　material　can　be　used.　Laser　Micro　Sintering(LMS)　was　recently　introduced　in　the　fabrication　of　3D　MEMS　parts.　The　main　difference　between　SLS　and　LMS　technology　is　the　powder　feeding　method　and　laser　system.　In　this　paper　a　newly　developed　powder　feeding　system　has　been　reported.　The　sysete　makes　use　of　ultrasonic　device　to　deposit　micron　powder　particles　to　form　thin　pattern　on　the　substrate.　The　powder　can　be　micro　sintered　selectively　by　a　micro-sized　fiber　laser　beam.　After　optimization　of　experimental　parameters　we　can　finally　sinter　3D　micro　parts　with　micron　metallic　powder　This　electronic　document　is　a　＂live＂　template.　The　various　components　of　your　paper　[title,　text,　heads,　etc.]　are　already　defined　on　the　style　sheet,　as　illustrated　by　the　portions　given　in　this　document.　Please　limit　your　abstract　to　250　words.