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作者:

Han, B. D. (Han, B. D..) | Hu, D. Q. (Hu, D. Q..) | Xie, S. S. (Xie, S. S..) | Ha, Y. P. (Ha, Y. P..) | Kang, B. W. (Kang, B. W..)

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CPCI-S

摘要:

Based on proximity gettering of platinum by vacancy defects which are induced by proton irradiation, local platinum doping is obtained. It is used as a local lifetime control technology in high-power diodes. The theoretical dependence of electrical active Pt concentration Cpts on irradiation induced defects concentration Cv is also studied. The diodes' reverse performance parameters are measured. They are functions of irradiation dose. For low proton irradiation dose, the gettered quantities of platinum by irradiation induced defects are enhanced when the irradiation dose increases. This can improve the performances of the device. But when the proton irradiation dose is high enough, the peak concentration of gettered platinum tends saturation. Further more, for deep junction device, the side effect brought by high dose irradiation will decrease the platinum gettering efficiency and the performances of the device degenerated under higher irradiation dose. On the base of theoretical study, we improved the device structure and manufacture process, a higher peak concentration is obtained. The recovery speed has been improved further.

关键词:

gettering efficiency irradiation dose localized platinum doping platinum gettering power diode

作者机构:

  • [ 1 ] [Han, B. D.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China
  • [ 2 ] [Hu, D. Q.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China
  • [ 3 ] [Xie, S. S.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China
  • [ 4 ] [Ha, Y. P.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China
  • [ 5 ] [Kang, B. W.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Han, B. D.]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China

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来源 :

IEEE 5TH INTERNATIONAL POWER ELECTRONICS AND MOTION CONTROL CONFERENCE, VOLS 1-3, CONFERENCE PROCEEDINGS

年份: 2006

页码: 1143-,

语种: 英文

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