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摘要:
This paper presents the working theory and fabrication of a micromechanical electromagnetic relay based on MEMS technology. The magnetic circuit system of the microrelay consists of the lower magnetic. circuit, a planar spiral coil, a fixed contact and a movable contact. Compared to the traditional relay, a planar coil is substituted for a solenoid coil and favor of the CMOS planar fabrication. The relay size of about 5mm x 5mm x 0.4mm is fabricated using the common micromachining technology like lithography, electroplating as well as sacrificial layer etching. Theoretical calculations are also carried out with respect to the electromagnetic forces yielded by the exciting coil using the magnetic circuit model. In addition, the primary testing results of the microrelay are given. The coil resistance of the microrelay is about 160Omega. When the current is 50mA through the coil, the movable contact can complete the pull-on action. The conducting resistance of the microrelay is about 1.7Omega after pull-on.
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来源 :
PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3
年份: 2004
页码: 344-347
语种: 英文