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作者:

Li, DS (Li, DS.) (学者:李德胜) | Zhang, YF (Zhang, YF.) (学者:张跃飞)

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摘要:

This paper studies the static and dynamic behaviors of a novel microrelay applied in microelectromechanical systems (MEMS) by electromagnetic attraction. The device is composed of a square planar coil, a movable magnetic film with two-supporting cantilever beams and a pair of contacts. The electromagnetic force Yielded by the exciting electromagnetic coil actuates the microrelay, and the main advantage is its capability of providing higher forces over relatively large distance. Static and dynamic finite element (FE) simulations are implemented to obtain the mechanical characteristics of the microrelay, the natural frequencies and mode shapes under different levels of electromagnetic attraction. Theoretical studies on the dynamic model are developed to validate the FE simulation results. Good agreement is found between the FE simulation and the theoretical analysis.

关键词:

finite element simulation mechanical characteristic MEMS microrelay theoretical analysis

作者机构:

  • [ 1 ] Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing, Peoples R China

通讯作者信息:

  • 李德胜

    [Li, DS]Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing, Peoples R China

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来源 :

INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS

年份: 2003

页码: 292-296

语种: 英文

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

万方被引频次:

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