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Author:

Li, DS (Li, DS.) (Scholars:李德胜) | Zhang, YF (Zhang, YF.) (Scholars:张跃飞)

Indexed by:

CPCI-S EI Scopus

Abstract:

This paper studies the static and dynamic behaviors of a novel microrelay applied in microelectromechanical systems (MEMS) by electromagnetic attraction. The device is composed of a square planar coil, a movable magnetic film with two-supporting cantilever beams and a pair of contacts. The electromagnetic force Yielded by the exciting electromagnetic coil actuates the microrelay, and the main advantage is its capability of providing higher forces over relatively large distance. Static and dynamic finite element (FE) simulations are implemented to obtain the mechanical characteristics of the microrelay, the natural frequencies and mode shapes under different levels of electromagnetic attraction. Theoretical studies on the dynamic model are developed to validate the FE simulation results. Good agreement is found between the FE simulation and the theoretical analysis.

Keyword:

mechanical characteristic finite element simulation theoretical analysis MEMS microrelay

Author Community:

  • [ 1 ] Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing, Peoples R China

Reprint Author's Address:

  • 李德胜

    [Li, DS]Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing, Peoples R China

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Source :

INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS

Year: 2003

Page: 292-296

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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