This　paper　proposed　a　method　of　analyzing　the　measurement　accuracy　of　a　laser　tracing　system　using　the　deviation　of　the　incident　beam　from　the　center　of　a　cat＇s　eye　retro-reflector.　Based　on　the　laser　tracing　system＇s　measurement　principle,　a　corresponding　model　is　established　to　analyze　the　influence　of　the　incident　beam　deviation　from　the　center　of　cat＇s　eye　retro-reflector　at　the　initial　measurement　position　on　the　measurement　accuracy.　The　measurement　experiments　verified　that　the　influence　was　significant.　When　the　deviation　between　the　incident　beam　and　the　center　of　the　cat＇s　eye　retro-reflector　was　-50　μm,　the　displacement　measurement　error　was　3.5867　±　0.0260　μm.　When　the　deviation　was　50　μm,　the　displacement　measurement　error　reached　3.5939　±　0.0189　μm.　The　relative　displacement　error　between　the　cat＇s　eye　retro-reflector　and　the　laser　tracing　system　decreased　the　measurement　system＇s　accuracy.　This　study　provides　an　important　theoretical　basis　for　evaluating　and　improving　the　accuracy　and　reliability　of　laser　tracing　measurement　systems.　©　2020