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作者:

Ji, Lingfei (Ji, Lingfei.) (学者:季凌飞) | Ma, Rui (Ma, Rui.) | Zhang, Ximin (Zhang, Ximin.) | Sun, Zhengyang (Sun, Zhengyang.) | Li, Xin (Li, Xin.)

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摘要:

Laser lift-off (LLO) is a technique used to transfer devices to terminal substrates through the ablation of materials by pulsed laser irradiation. Recently, LLO has become the major technique for the fabrication of flexible electronic devices because of its wide material applicability and process compatibility. Further, the representative research achievements of LLO in case of the fabrication of flexible electronics are investigated and presented in this study with respect to the basic mechanisms and technological features, and novel theories and application techniques are given particular emphasis. Accordingly, the application prospects of the LLO technique, especially the possibility of ultrafast laser applications, are summarized and forecasted. © 2020, Chinese Lasers Press. All right reserved.

关键词:

Pulsed lasers Electronics industry Laser materials processing Flexible electronics Ultrafast lasers

作者机构:

  • [ 1 ] [Ji, Lingfei]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Ji, Lingfei]Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing; 100124, China
  • [ 3 ] [Ma, Rui]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Ma, Rui]Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing; 100124, China
  • [ 5 ] [Zhang, Ximin]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 6 ] [Zhang, Ximin]Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing; 100124, China
  • [ 7 ] [Sun, Zhengyang]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 8 ] [Sun, Zhengyang]Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing; 100124, China
  • [ 9 ] [Li, Xin]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 10 ] [Li, Xin]Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing; 100124, China

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2020

期: 1

卷: 47

被引次数:

WoS核心集被引频次:

SCOPUS被引频次: 7

ESI高被引论文在榜: 0 展开所有

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