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作者:

Li, Ying (Li, Ying.) | Lan, Tian (Lan, Tian.) | Yang, Dengcai (Yang, Dengcai.) | Wang, Zhiyong (Wang, Zhiyong.) (学者:王智勇)

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EI Scopus SCIE

摘要:

In this paper, a low-loss ridge waveguide based on the thin film lithium niobate (TFLN) is successfully fabricated using a proton-exchanged wet etching (PEWE) technique, which can result in a much better vertical sidewall angle and improve the surface roughness to reduce the scattering loss. The average etching rate is obviously improved by the structural defects and phase transition induced by our modified PE process, and the finally optimized etching rate is as fast as 13.5 nm/min. The propagation loss of the fabricated straight ridge waveguide is measured to be 4.3 dB/cm by using an 850 nm single mode laser as the light source. Meanwhile, a Y-branch waveguide is also measured with a uniform light splitting ratio of nearly 1:1. Furthermore, this work offers the route for the manufacturing of low-cost and high-efficiency photonic integration platform.

关键词:

Ridge waveguides Proton exchange Thin film lithium niobate Wet etching

作者机构:

  • [ 1 ] [Li, Ying]Beijing Univ Technol, Inst Adv Technol Semicond Opt & Elect, Beijing 100124, Peoples R China
  • [ 2 ] [Lan, Tian]Beijing Univ Technol, Inst Adv Technol Semicond Opt & Elect, Beijing 100124, Peoples R China
  • [ 3 ] [Yang, Dengcai]Beijing Univ Technol, Inst Adv Technol Semicond Opt & Elect, Beijing 100124, Peoples R China
  • [ 4 ] [Wang, Zhiyong]Beijing Univ Technol, Inst Adv Technol Semicond Opt & Elect, Beijing 100124, Peoples R China
  • [ 5 ] [Li, Ying]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Lan, Tian]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Yang, Dengcai]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Wang, Zhiyong]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Li, Ying]Beijing Univ Technol, Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Lan, Tian]Beijing Univ Technol, Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 11 ] [Yang, Dengcai]Beijing Univ Technol, Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 12 ] [Wang, Zhiyong]Beijing Univ Technol, Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • 王智勇

    [Lan, Tian]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China;;[Wang, Zhiyong]Beijing Univ Technol, Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China

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来源 :

OPTICAL MATERIALS

ISSN: 0925-3467

年份: 2021

卷: 120

3 . 9 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:116

JCR分区:2

被引次数:

WoS核心集被引频次: 6

SCOPUS被引频次: 7

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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