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作者:

Zhou, Xintian (Zhou, Xintian.) | Pang, Haoyang (Pang, Haoyang.) | Jia, Yunpeng (Jia, Yunpeng.) | Hu, Dongqing (Hu, Dongqing.) | Wu, Yu (Wu, Yu.) | Zhang, Shida (Zhang, Shida.) | Li, Yuan (Li, Yuan.) | Li, Xinyu (Li, Xinyu.) | Wang, Lihao (Wang, Lihao.) | Fang, Xingyu (Fang, Xingyu.) | Zhao, Yuanfu (Zhao, Yuanfu.)

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EI Scopus SCIE

摘要:

This article presents the experimental characterization of SiC MOSFETs exposed to heavy-ion irradiation. Different leakage paths related to the drain bias used during the tests are observed, suggesting different damage sites in the devices, which can be further verified through the post-irradiation measurements. TCAD simulations are utilized to explore the underlying failure mechanisms. Based on the evolution of the gate oxide field, it is shown that the damage first occurs in the middle of the JFET region, while gradually spreads to the channel region with the increase of drain bias, but terminates at the source region. A preliminary model to roughly emulate the drain bias dependence of such degradation behaviors is developed, and the simulation results match the experiments well. Additionally, the emission microscope (EMMI) is carried out so as to detect the latent damage at the die level. The findings in this article demonstrate that more attention should be paid to the damaged gate oxide induced by the heavy-ion strike before SiC MOSFETs could act as a drop-in replacement of Si-based counterparts in avionic applications.

关键词:

SiC MOSFETs MOSFET Silicon carbide Leakage currents Radiation effects heavy-ion irradiation Ions Logic gates Degradation Gate oxide damage

作者机构:

  • [ 1 ] [Zhou, Xintian]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Pang, Haoyang]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Jia, Yunpeng]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Hu, Dongqing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Wu, Yu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Zhang, Shida]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Li, Yuan]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Li, Xinyu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Wang, Lihao]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Fang, Xingyu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 11 ] [Zhao, Yuanfu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • [Jia, Yunpeng]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China;;[Hu, Dongqing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China

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来源 :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

年份: 2021

期: 8

卷: 68

页码: 4010-4015

3 . 1 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:87

JCR分区:2

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 15

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 3

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