Abstract:
1.化学机械抛光(CMP)简介2.CMP铈基抛光粉的制备及表征3.CMP铈基抛光液的组成及表征方法4.CMP铈基抛光粉/液的应用
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Year: 2021
Language: Chinese
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 1
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