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This paper introduces a single-axis electrostatic micro-gyroscope made of a cantilever beam and a proof mass fixed at the free end of the beam. The proof mass is under the coupled action of two fixed electrodes, both of which are connected to DC voltage to produce larger static deformation. The electrode in the driving direction is also subjected to AC voltage, which drives the proof mass to produce the primary vibration. Due to the rotation, a second-order vibration is generated by the Coriolis force in the sense direction which is perpendicular to the primary vibration. Therefore, the angular speed can be measured by detecting the amplitude of the second-order vibration. First, the governing equations of vibrating beam micro-gyroscope are deduced by Hamilton principle and the two transverse coupled vibrations of the rotating cantilever beam are investigated. Next, the influence of multiple parameters on the static deformation of micro-gyroscope is analyzed and the first two natural frequencies of the system are obtained. The effects of different parameters on the natural frequencies of the system are presented, and the dynamic amplification effect and its calibration curve in the drive and sense directions of the system are discussed. © 2020, Nanjing Univ. of Aeronautics an Astronautics. All right reserved.
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来源 :
Journal of Vibration Engineering
ISSN: 1004-4523
年份: 2020
期: 4
卷: 33
页码: 742-749