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摘要:
GeTe-Sb2Te3-based superlattice (GST-SL) is a new phase change film prepared with alternative GeTe and Sb2Te3 layers, known as interfacial phase-change material, showing strongly improved switching properties. However, the recent experiments showed that Ge/Sb atomic intermixing was hardly to be avoided and would influence the phase change process. In this paper, the effects of Ge/Sb atomic intermixing on the local structure and phase change mechanism were investigated by first-principles simulations. The free energy evolution with temperatures indicated that Ge/Sb intermixing is helpful for phase change. The bond analysis and local order parameter showed that no obvious structure changes happened when lower than 1200 K, and there were almost no fourfold Ge-tetrahedral structures even when quenched from 1500 K, different from the traditional GST materials. The Ge/Sb intermixing and its ratios can not only influence the structural transition, but also play a vital role on the optical properties. These findings enrich a deep understanding of Ge/Sb intermixing on GST-SL phase changes.
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来源 :
TMS 2020 149TH ANNUAL MEETING & EXHIBITION SUPPLEMENTAL PROCEEDINGS
ISSN: 2367-1181
年份: 2020
页码: 1777-1786
语种: 英文
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