Non-thermal　plasma　technology　was　used　to　purify　benzene　with　benzene　removal　efficiency　as　the　evaluation　indicator.　According　to　the　single　factor　experiments,　the　range　of　specific　energy　density,　initial　concentration　and　oxygen　content　was　determined.　The　influence　of　interaction　and　interaction　on　the　removal　efficiency　of　benzene　was　investigated　by　Design-Expert　response　surface　method.　The　composition　of　by-products　was　analyzed　by　Fourier　transform-infrared　spectroscopy(FTIR),　gas　chromatography/mass　spectrometry　(GC-MS)　and　scanning　electron　microscopy(SEM).　According　to　the　simulation　of　the　quadratic　polynomial　model,　the　individual　variables,　the　interaction　of　the　specific　energy　density　and　the　oxygen　content　had　a　significant　effects　on　the　removal　efficiency　of　benzene.　The　results　showed　that　the　optimal　parameters　were　determined　as　the　specific　energy　density　of　5.98kJ/L,　initial　concentration　of　452.08mg/m3　and　the　oxygen　volume　fraction　of　1.66%.　The　removal　efficiency　model-predicted　was　96.63%,　the　average　value　measured　was　95.23%　and　the　relative　error　between　the　two　results　was　1.40%,　which　indicated　that　the　quadratic　polynomial　model　was　reliable.　The　solid　phase　by-products　mainly　contained　long-chain　alkanes,　long-chain　olefins,　phenols,　esters,　ketones　and　amides.　The　overall　morphology　was　cluster-like　with　obvious　spherical　morphology.　The　undegraded　benzene,　ethylene　oxide,　benzonitrile,　4-cyanopyridine　were　detected　in　the　liquid　phase　product.　In　addition　to　the　CO2　produced　by　mineralization　and　undegraded　benzene,　the　gas　phase　product　also　had　benzonitrile　and　ester.　©　2020,　Chemical　Industry　Press.　All　right　reserved.