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作者:

Li, Xinyu (Li, Xinyu.) | Jia, Yunpeng (Jia, Yunpeng.) | Zhou, Xintian (Zhou, Xintian.) | Zhao, Yuanfu (Zhao, Yuanfu.) | Wu, Yu (Wu, Yu.) | Hu, Dongqing (Hu, Dongqing.) | Fang, Xingyu (Fang, Xingyu.) | Deng, Zhonghan (Deng, Zhonghan.)

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SCIE

摘要:

A novel split-gate-trench MOSFET integrated with normal gate and built-in channel diode (BCD) in the same trench is proposed and simulated with Sentaurus TCAD in this paper. Compared with the conventional SGT MOSFET (C-SGT MOS) and conventional SGT MOSFET with built-in channel diode (CBCD-SGT MOS), the proposed MOSFET exhibits superior performances, such as smaller turn-on voltage and lower reverse recovery charges when working in the third quadrant, and reduced gate charge and gate-to-drain charge when working in the first quadrant. With the negligible degradation of the on-state resistance, significant improvements in the figures of merit can be obtained. What's more, obvious uniform forward and reverse conduction current distribution of proposed structure is observed compared to CBCD-SGT MOS although two types of devices are both featuring BCD structure, which could increase the robustness of device when working in high-power and high-frequency applications.

关键词:

built-in channel diode current distribution Current distribution Doping figure of merit Logic gates MOSFET reverse recovery characteristics Schottky diodes Semiconductor process modeling Split gate flash memory cells Split-gate-trench MOSFET

作者机构:

  • [ 1 ] [Li, Xinyu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Jia, Yunpeng]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Zhou, Xintian]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Zhao, Yuanfu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Wu, Yu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Hu, Dongqing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Fang, Xingyu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Deng, Zhonghan]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Zhao, Yuanfu]Beijing Microelect Technol Inst, Beijing 100076, Peoples R China

通讯作者信息:

  • [Zhou, Xintian]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China;;[Zhao, Yuanfu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China

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来源 :

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY

ISSN: 2168-6734

年份: 2021

卷: 9

页码: 839-845

2 . 3 0 0

JCR@2022

被引次数:

WoS核心集被引频次: 4

SCOPUS被引频次: 5

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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