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作者:

Wang, Di (Wang, Di.) | Ma, Xiaochen (Ma, Xiaochen.) | Chen, Rongrong (Chen, Rongrong.) | Le, Yong (Le, Yong.) | Zhang, Biao (Zhang, Biao.) | Xiao, Hongdi (Xiao, Hongdi.) | Luan, Caina (Luan, Caina.) | Ma, Jin (Ma, Jin.)

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EI Scopus SCIE

摘要:

Ta-doped Ga2O3 (Ga2O3:Ta) epitaxial films were grown on SrTiO3 (100) substrates via an MOCVD system. Solar blind ultraviolet (UV) detectors with a metal-semiconductor-metal structure were fabricated based on the beta-Ga2O3:Ta films, and the effects of Ta doping concentration on the photo response were investigated. The surface morphology, composition and band gap of the films were characterized. The beta-Ga2O3:Ta UV detectors showed photo response characteristics under 222 nm deep UV light. As the Ta doping concentration increased, the responsivity of the detector increased significantly. For the 1.5 at.% Ta doped UV detector, the responsivity under 222 nm UV light at 8 V bias reached 8.23 A W-1, and the light-dark current ratio is close to 10(3). Moreover, the responsive rise time (T-r1/T-r2) and decay time (T-d1/T-d2) at 1 V bias were as short as 0.37 s/0.38 s and 0.41s/0.85 s, respectively. Ta doping significantly improves the performance of beta-Ga2O3 ultraviolet detectors, which may be a feasible method to expand its application potential.

关键词:

Ultraviolet detector beta-Ga2O3 Doping Epitaxial film Metal-semiconductor-metal structure

作者机构:

  • [ 1 ] [Wang, Di]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 2 ] [Chen, Rongrong]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 3 ] [Le, Yong]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 4 ] [Zhang, Biao]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 5 ] [Xiao, Hongdi]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 6 ] [Luan, Caina]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 7 ] [Ma, Jin]Shandong Univ, Sch Microelect, Jinan 250101, Peoples R China
  • [ 8 ] [Ma, Xiaochen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

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来源 :

OPTICAL MATERIALS

ISSN: 0925-3467

年份: 2022

卷: 129

3 . 9

JCR@2022

3 . 9 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:66

JCR分区:2

中科院分区:3

被引次数:

WoS核心集被引频次: 20

SCOPUS被引频次: 21

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 8

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