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摘要:
Ta-doped Ga2O3 (Ga2O3:Ta) epitaxial films were grown on SrTiO3 (100) substrates via an MOCVD system. Solar blind ultraviolet (UV) detectors with a metal-semiconductor-metal structure were fabricated based on the beta-Ga2O3:Ta films, and the effects of Ta doping concentration on the photo response were investigated. The surface morphology, composition and band gap of the films were characterized. The beta-Ga2O3:Ta UV detectors showed photo response characteristics under 222 nm deep UV light. As the Ta doping concentration increased, the responsivity of the detector increased significantly. For the 1.5 at.% Ta doped UV detector, the responsivity under 222 nm UV light at 8 V bias reached 8.23 A W-1, and the light-dark current ratio is close to 10(3). Moreover, the responsive rise time (T-r1/T-r2) and decay time (T-d1/T-d2) at 1 V bias were as short as 0.37 s/0.38 s and 0.41s/0.85 s, respectively. Ta doping significantly improves the performance of beta-Ga2O3 ultraviolet detectors, which may be a feasible method to expand its application potential.
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来源 :
OPTICAL MATERIALS
ISSN: 0925-3467
年份: 2022
卷: 129
3 . 9
JCR@2022
3 . 9 0 0
JCR@2022
ESI学科: MATERIALS SCIENCE;
ESI高被引阀值:66
JCR分区:2
中科院分区:3
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