Giant Enhancement in the Thermal Responsivity of Microelectromechanical Resonators by Internal Mode Coupling - 文章详情页

作者：

Zhang, Ya (Zhang, Ya.) (学者：张永安) | Kondo, Ryoka (Kondo, Ryoka.) | Qiu, Boqi (Qiu, Boqi.) | Liu, Xin (Liu, Xin.) | Hirakawa, Kazuhiko (Hirakawa, Kazuhiko.)

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摘要：

We　report　on　a　giant　enhancement　in　the　thermal　responsivity　of　doubly　clamped　GaAs　microelectromechanical-system-　(MEMS)　beam　resonators　by　using　the　internal-mode-coupling　effect.　This　is　achieved　by　coupling　the　fundamental　bending　mode　with　the　fundamental　torsional　mode　of　the　MEMS-beam　resonators　through　the　cubic　Duffing　nonlinearity.　In　the　mode-coupling　regime,　we　find　that　when　the　input　heat　to　the　MEMS　resonators　is　modulated　at　a　particular　frequency,　the　resonance-frequency　shift　caused　by　heating　can　be　enhanced　by　almost　2　orders　of　magnitude.　The　observed　effect　is　promising　for　realization　of　high-sensitivity　thermal　sensing　by　use　of　MEMS　resonators,　such　as　ultrasensitive　terahertz　detection　at　room　temperature.　©　2020　American　Physical　Society.

关键词：

Gallium arsenide MEMS Resonators III-V semiconductors Crystal resonators Microelectromechanical devices

作者机构：

[ 1 ] [Zhang, Ya]Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo; 184-8588, Japan
[ 2 ] [Kondo, Ryoka]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
[ 3 ] [Qiu, Boqi]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
[ 4 ] [Liu, Xin]Beijing-Dublin International College, Institute of Theoretical Physics, Beijing University of Technology, 100 Pingleyuan, Beijing; 100124, China
[ 5 ] [Hirakawa, Kazuhiko]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
[ 6 ] [Hirakawa, Kazuhiko]Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan

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