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作者:

Xu, Ke (Xu, Ke.) | An, Qiang (An, Qiang.) | Li, Peng (Li, Peng.)

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EI Scopus SCIE

摘要:

The atomic force microscope (AFM) is widely used in many fields such as biology, materials, and physics due to its advantages of simple sample preparation, high-resolution topography measurement and wide range of applications. However, the low scanning speed of traditional AFM limits its dynamics process monitoring and other further application. Therefore, the improvement of AFM scanning speed has become more and more important. In this review, the working principle of AFM is first proposed. Then, we introduce the improvements of cantilever, drive mechanism, and control method of the high-speed atomic force microscope (HS-AFM). Finally, we provide the next developments of HS-AFM.

关键词:

AFM topography cantilever feedback control algorithm scanner High-speed AFM

作者机构:

  • [ 1 ] [Xu, Ke]Shenyang Jianzhu Univ, Sch Informat & Control Engn, Shenyang, Peoples R China
  • [ 2 ] [An, Qiang]Shenyang Jianzhu Univ, Sch Informat & Control Engn, Shenyang, Peoples R China
  • [ 3 ] [Li, Peng]Beijing Univ Technol, Fac Mat & Mfg, Beijing 100124, Peoples R China

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来源 :

CURRENT NANOSCIENCE

ISSN: 1573-4137

年份: 2022

期: 5

卷: 18

页码: 545-553

1 . 5

JCR@2022

1 . 5 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:66

JCR分区:4

中科院分区:4

被引次数:

WoS核心集被引频次: 3

SCOPUS被引频次: 3

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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