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作者:

Xiong, Fangzhu (Xiong, Fangzhu.) | Qian, Fengsong (Qian, Fengsong.) | Sun, Jie (Sun, Jie.) | Guo, Weiling (Guo, Weiling.) | Li, Longfei (Li, Longfei.) | Xie, Yiyang (Xie, Yiyang.) | Du, Zaifa (Du, Zaifa.) | Dong, Yibo (Dong, Yibo.) | Wang, Le (Wang, Le.) | Xu, Chen (Xu, Chen.)

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EI Scopus SCIE

摘要:

Using the plasma-enhanced chemical vapor deposition method, we grow vertical graphene thin films onto SiO2/Si substrates, which is a special format of graphene composed of numerous macroscopically uniformly distributed graphene flakes approximately vertically arranged. The growth parameters, including the growth temperature, growth time and plasma power, are systematically studied and optimized. Most importantly, the function of plasma has been revealed. In the same deposition machine, we have altered the plasma electrode and heater configurations, and found that the vertical graphene can only grow in local plasma environment. That is, the samples have to be well immersed in the plasma sheath electric field. In this way, the vertical growth of graphene and the local enhancement of electric field can form a positive feedback loop, resulting in the continuous growth of vertical graphene. This experiment clarifies the function of plasma electric field in the vertical graphene growth, and can offer hints for the growth of other vertical two-dimensional materials as well. The vertical graphene films are scalable, transfer-free and lithographically patternable, which is compatible with standard semiconductor processing and promising for optoelectronic applications. We have characterized the optical properties of the as-grown vertical graphene films, where a nearly zero transmittance is observed for 1100-2600nm wavelengths, indicating a superstrong absorption in the black colored vertical graphene.

关键词:

Vertical graphene PECVD local plasma remote plasma

作者机构:

  • [ 1 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Qian, Fengsong]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Li, Longfei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Xie, Yiyang]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Du, Zaifa]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Wang, Le]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Xu, Chen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Sun, Jie]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Peoples R China
  • [ 11 ] [Sun, Jie]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350116, Peoples R China

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来源 :

NANO

ISSN: 1793-2920

年份: 2022

期: 10

卷: 17

1 . 2

JCR@2022

1 . 2 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:41

JCR分区:4

中科院分区:4

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 5

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