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作者:

Chen, Jiaxin (Chen, Jiaxin.) | Wang, Jialu (Wang, Jialu.) | Li, Mengmei (Li, Mengmei.) | Guo, Weiling (Guo, Weiling.) | Shen, Lifan (Shen, Lifan.) | Yang, Xin (Yang, Xin.) | Sun, Jie (Sun, Jie.)

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EI Scopus SCIE

摘要:

Electromigration is one of the most stubborn and serious reliability failure mechanisms in interconnection wires. Specifically, there is a high risk of electromigration in the special metal interconnection electrode structure of high-voltage light-emitting diodes (HV-LEDs). Nevertheless, a systematic investigation on this issue is lacking in literature. Here, simulations and experiments were conducted to systematically investigate the metallization reliability of gallium nitride based HV-LEDs (9 V, 100 mA) which were designed and fabricated in this study. The finite element model of the devices was established by the ANSYS software. Numerical solutions of the interconnected electrodes were obtained by multiphysics field coupling electric-thermal-structure simulation. It was found that the temperature, temperature gradient, current density, and stress all reached maximum at the n-type metal of the interconnected electrode, which provided the theoretical support for the experiment. Then, the accelerated aging experiment was conducted under high temperature (85 degrees C) and high current injection (100 mA, 130 mA, 150 mA, 170 mA). It was found that whiskers started to appear from the sidewalls of the Cr/Al/Cr/Pt/Au n-type electrode after 30 hours of burn-in test. The electromigration was more likely to occur at the n-type electrode, which was consistent with the results of the simulation. Finally, the causes of the HV-LED metallization failure were analyzed. It was determined that high current density and high temperature were the main reasons for the electromigration of the interconnected electrodes in HV-LEDs. This work fills the knowledge gap of metallization reliability study of GaN HV-LEDs and is of value to the design, fabrication and application of the devices.

关键词:

Metallization Electrodes Reliability metallization reliability electromigration Light emitting diodes High-voltage light-emitting diodes Electromigration Metals aging experiment Integrated circuit interconnections interconnected electrode

作者机构:

  • [ 1 ] [Chen, Jiaxin]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Wang, Jialu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Mengmei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Shen, Lifan]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Yang, Xin]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Sun, Jie]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display T, Coll Phys & Informat Engn, Fuzhou 350100, Peoples R China
  • [ 8 ] [Sun, Jie]Fuzhou Univ, Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350100, Peoples R China

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来源 :

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

ISSN: 1530-4388

年份: 2021

期: 4

卷: 21

页码: 472-478

2 . 0 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:87

JCR分区:3

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 1

ESI高被引论文在榜: 0 展开所有

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