CuCrO2　thin　films　were　prepared　by　radio　frequency　magnetron　sputtering　on　quartz　substrates.　The　influence　of　substrate　temperature　on　the　structural　and　optoelectronic　properties　was　investigated.　XRD　and　XPS　results　show　that　923　K　and　1023　K　deposited　films　has　a　delafossite　structure　without　other　phases.　The　electrical　conductivity　and　optical　transmittance　increase　with　the　increase　of　substrate　temperature.　When　the　substrate　temperature　is　1023　K,　the　film　has　a　higher　optical　transmittance　and　electrical　conductivity.　Its　transparence　in　visible　light　is　50%,　and　the　conductivity　at　room　temperature　is　0.33　S/cm.　The　temperature　dependence　of　electrical　conductivity　agrees　well　with　the　Arrhenius　rule　in　the　temperature　range　of　150-300　K　for　the　1023　K　deposited　sample,　and　the　activation　energy　is　0.04　eV.　©　2019,　Science　Press.　All　right　reserved.