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作者:

He, Bao-Feng (He, Bao-Feng.) | Ding, Si-Yuan (Ding, Si-Yuan.) | Wei, Cui-E (Wei, Cui-E.) | Liu, Bing-Xian (Liu, Bing-Xian.) | Shi, Zhao-Yao (Shi, Zhao-Yao.) (学者:石照耀)

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摘要:

The measurement of surface roughness is a crucial tool for characterizing engineering surfaces. After more than 20 years of development, areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces. This study includes summaries and comparisons of the characteristics of areal surface roughness, contact and non-contact measurement methods, and nanometer-scale surface roughness analysis methods. The applications and limitations of existing methods are also analyzed, and the direction for future development is presented. © 2019, Science Press. All right reserved.

关键词:

Surface measurement Surface roughness

作者机构:

  • [ 1 ] [He, Bao-Feng]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Ding, Si-Yuan]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Wei, Cui-E]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Liu, Bing-Xian]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [Shi, Zhao-Yao]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China

通讯作者信息:

  • [he, bao-feng]beijing engineering research center of precision measurement technology and instruments, beijing university of technology, beijing; 100124, china

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来源 :

Optics and Precision Engineering

ISSN: 1004-924X

年份: 2019

期: 1

卷: 27

页码: 78-93

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 26

ESI高被引论文在榜: 0 展开所有

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