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The measurement of surface roughness is a crucial tool for characterizing engineering surfaces. After more than 20 years of development, areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces. This study includes summaries and comparisons of the characteristics of areal surface roughness, contact and non-contact measurement methods, and nanometer-scale surface roughness analysis methods. The applications and limitations of existing methods are also analyzed, and the direction for future development is presented. © 2019, Science Press. All right reserved.
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来源 :
Optics and Precision Engineering
ISSN: 1004-924X
年份: 2019
期: 1
卷: 27
页码: 78-93