Wafer　grinding　is　a　key　process　for　chip　packaging,　and　the　temperature　distribution　of　the　aerostatic　spindle　is　an　important　factor　affecting　the　grinding　accuracy　of　grinding　equipment.　Traditional　aerostatic　spindles　driven　by　induction　motors　will　generate　a　lot　of　heat,　which　will　seriously　affect　the　wafer　grinding　accuracy.　In　this　paper,　based　on　the　permanent　magnet　motor　technology　and　heat　transfer　theory,　and　according　to　the　working　characteristics　of　the　aerostatic　spindle,　an　embedded　permanent　magnet　motor　for　aerostatic　spindle　(ASEPM)　is　designed.　The　mathematical　model　of　the　electromagnetic　field　of　the　ASEPM　is　established,　and　the　transient　electromagnetic　analysis　is　carried　out　using　the　finite　element　analysis　software.　In　order　to　reduce　the　cogging　torque　and　output　torque　fluctuation　of　the　ASEPM,　a　new　type　of　slanted　pole　segmented　permanent　magnet　structure　is　designed.　The　influence　of　stator　structure　parameters,　rotor　segmented　slanted　pole　mode　and　number　of　segments　on　cogging　torque　and　output　torque　is　analyzed,　and　the　motor　parameters　are　optimized.　Taking　the　motor　loss　and　the　friction　loss　of　the　aerostatic　bearing　as　the　heat　source,　by　establishing　the　thermal　field　model　and　structural　field　model　of　the　aerostatic　spindle,　the　thermal　distribution　and　structural　deformation　of　the　aerostatic　spindle　are　analyzed.　This　paper　has　a　certain　reference　value　for　the　design　optimization　of　the　aerostatic　spindle　motor　and　the　temperature　and　structure　analysis　of　the　aerostatic　spindle.　©　2022　IEEE.