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作者:

Zhao, Shengjun (Zhao, Shengjun.) | Chen, Si (Chen, Si.) | Qin, Fei (Qin, Fei.) | Dai, Yanwei (Dai, Yanwei.) | Gong, Yanpeng (Gong, Yanpeng.)

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EI Scopus

摘要:

Through silicon via (TSV) and stacked bonding are the core technologies to perform vertical interconnect for 3D integration. For wafer-level multilayer stacking process, thermal stress is generated and accumulated due to the difference in thermal expansion coefficients of materials in each layer of the structure. Due to the large thermal stress, the issue of failures in the stacking process are caused by solder joints almost. Hence, thermal stress analyses for multilayer stacking process are in urgent need. In this paper, a finite element model (FEM) is established to investigate the reliabilities for six layered TSV wafer bonded. Selected the General Plane Deformation (GPD) FEM model as the simulation model for conserving computer resources and time because of the large number of TSVs. Birth and death element technology is applied, and descripted the procedure during the six layered wafer staking process. Considered three kinds of solder joint materials for SAC305, Sn63Pb37 and Sn10Pb90, and analyzed the von Mises stress and equivalent plastic strain. © 2022 IEEE.

关键词:

Binary alloys Wafer bonding Thermal stress Silicon wafers Finite element method Multilayers Chip scale packages Tin alloys Stress analysis Thermal expansion Lead alloys Three dimensional integrated circuits

作者机构:

  • [ 1 ] [Zhao, Shengjun]Beijing University of Technology, Faculty of Materials and Manufacturing, Beijing, China
  • [ 2 ] [Chen, Si]China Electronic Product Reliability and Environmental Testing Research Institute, Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, Guangzhou, China
  • [ 3 ] [Qin, Fei]Beijing University of Technology, Faculty of Materials and Manufacturing, Beijing, China
  • [ 4 ] [Dai, Yanwei]Beijing University of Technology, Faculty of Materials and Manufacturing, Beijing, China
  • [ 5 ] [Gong, Yanpeng]Beijing University of Technology, Faculty of Materials and Manufacturing, Beijing, China

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年份: 2022

语种: 英文

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