Traditional　capacitive　tactile　sensors　have　much　lower　sensitivity　in　the　direction　of　shear　force　than　in　that　in　the　normal　direction　owing　to　the　existence　of　coupling　measurement　of　signals.　To　resolve　this　issue,　a　highly　sensitive　tactile　sensor,　with　triaxial　force　decoupling　measurements　was　designed　based　on　multilayer　capacitor　structure.　The　sensor　comprised　of　measuring　units　for　both　the　shear　force　and　normal　directions.　The　measuring　unit　for　the　shear　force　direction　adopted　differential　finger　elements　with　symmetric　distribution　to　achieve　highly　sensitive　measurements.　The　structure　of　an　ultra-thin　elastic　silicone　dielectric　was　adopted　to　improve　the　effective　compression　stiffness　of　the　shear　dielectric　layer,　thereby　restraining　the　coupling　interference　from　the　normal　direction.　The　measuring　unit　for　the　normal　direction　useed　a　sparse　of　elastic　mesh　microstructure　as　the　dielectric　to　achieve　highly　sensitive　measurements.　The　coupling　interference　from　the　direction　of　the　shear　force　was　restrained　by　extending　the　normal　grounding　electrode.　The　tactile　sensor　was　manufactured　based　on　the　parametric　design　of　the　capacitor　structure.　Furthermore,　a　triaxial　force　system　was　built　to　test　the　sensor.　The　test　results　show　that　the　sensitivity　in　the　shear　X　and　Y　and　normal　directions　are　0.206　pF/N,　0.251　pF/N,　and　0.148　pF/N,　respectively.　Additionally,　the　maximum　static　coupling　ratios　between　the　shear　X　and　Y　directions　and　that　between　the　shear　and　normal　directions　are　7.636%　and　1.051%,　respectively.　The　proposed　sensor　achieves　decoupling　measurement　of　the　triaxial　force　and　maintains　the　same　level　of　high　sensitivity　in　the　shear　force　and　normal　directions.　©　2019,　Science　Press.　All　right　reserved.