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[期刊论文]

Measurement of Surface Acoustic Wave Velocity Curves of Silicon Crystal by Ultrasonic Method

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作者:

Song, Guorong (Song, Guorong.) | Hong, Guangfu (Hong, Guangfu.) | Lu, Dong (Lu, Dong.) | 展开

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EI Scopus PKU CSCD

摘要:

As the crystal materials are applied widely in the fields of aerospace, transportation, electrical and electronic engineering, energy and environmental protection, the new requirements for the researches of their special properties and testing work put forward. Based on the constitutive relationship between the propagation characteristic of acoustic wave in materials and the surface wave velocity, an acoustic elasticity theoretical model of the surface acoustic waves (SAW) velocities of silicon crystal contacting with its elastic constants is established. The theoretical SAW velocities distribution curves of different crystallographic planes versus azimuthal angles are calculated by using the transformation matrix. Experimental measurements of SAW velocities along different azimuthal angles of three crystallographic planes by using the line focusing acoustic transducer, the high-precision defocusing measurement system and V (f, z) analysis, and the experimental curves of SAW velocities are consistent with the theoretical values. It proves that acoustic microscopy (AM) technology is of highly accuracy and reliability for the SAW velocities measurements of anisotropic materials. Meanwhile, the corresponding consistency between the crystal structure and SAW velocities of silicon crystal is studied further, which establishes the theoretical basis for the property detections and evaluations of anisotropic materials including silicon crystal. © 2018 Journal of Mechanical Engineering.

关键词:

Acoustic variables measurement Materials handling Acoustic surface wave devices Elastic constants Elasticity Acoustic wave velocity Surface waves Silicon Acoustic waves Linear transformations Acoustic microscopes Acoustic wave propagation Crystal structure Optical anisotropy

作者机构:

  • [ 1 ] [Song, Guorong]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Hong, Guangfu]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Lu, Dong]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Lü, Yan]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [He, Cunfu]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 6 ] [Wu, Bin]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing; 100124, China

通讯作者信息:

  • [song, guorong]college of mechanical engineering and applied electronic technology, beijing university of technology, beijing; 100124, china

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来源 :

Journal of Mechanical Engineering

ISSN: 0577-6686

年份: 2018

期: 6

卷: 54

页码: 110-117

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