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A novel SiC double-trench MOSFET (DT-MOS) with embedded MOS-channel diode is proposed and investigated via TCAD simulations in this article. The parasitic body diode is free from activation when the device serves as a freewheeling diode, thus completely eliminating the bipolar degradation. Moreover, the proposed MOSFET features superior dynamic characteristics. The gate charge and gate-to-drain charge are reduced by a factor of 3.9, respectively, when compared to the conventional state-of-the-art SiC DT-MOS. Combined with the slightly increased ON-resistance remarkably improved figures of merit are reduced by a factor of 3.7, respectively are obtained in the proposed structure. When working as a switching device under 200 kHz, the proposed MOSFET could save nearly of the total power losses, making it more conductive to high-frequency applications. In addition, the influence of parameters variation on the device performance is discussed as well.
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