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Signal processing in a quadrant photodiode used to track target movement velocity and reflect target displacement must provide rapid and accurate dynamic response for a laser tracker. According to the operation principle of a quadrant photodiode, we derived the relationship between the output signal and the spot offset using a diagonal algorithm for the transcendental function. Considering that it is not easy to solve the transcendental function, in combination with the laser spot characteristics, a Taylor series expansion algorithm was adopted. A verification experiment for the spot offset measurement system was performed using a high-precision rectangular coordinate measuring machine. The results show that the system possesses a fast measurement speed and high measurement accuracy. The measurement can reach 1050 times per second, and the accuracy is 6 μm within a measurement range of ±400 μm. The system can be widely applied in related fields in which a microdisplacement measurement is necessary. © 2017, Editorial Department of Journal of HEU. All right reserved.
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来源 :
Journal of Harbin Engineering University
ISSN: 1006-7043
年份: 2017
期: 2
卷: 38
页码: 258-262