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作者:

Chen, Hongfang (Chen, Hongfang.) | Zheng, Bowen (Zheng, Bowen.) | Shi, Zhaoyao (Shi, Zhaoyao.) (学者:石照耀) | Sun, Yanqiang (Sun, Yanqiang.) | Long, Changyu (Long, Changyu.) | Yang, Zaihua (Yang, Zaihua.)

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摘要:

Coordinate measuring machine (CMM) is a high efficiency precision measurement system for coordinate measurement technology. As the development of ultra-precision machining technology, the requirement of the measuring precision of CMM is getting higher and higher. Considering the weak rigid body state of CMM in the process of measurement, this paper proposes a CMM spatial coordinate correction method based on multistation measurement of laser tracer. Firstly, the laser tracer multistation measurement system is set up. Then, the coordinate of measuring point of CMM is corrected by using the high precision interference length of the laser tracer. Finally, the measuring spatial coordinate of CMM is corrected by using the trilinear interpolation method. The simulation experimental results show that the average of the standard deviation of the standard sphere diameter obtained by proposed spatial coordinate correction method is 0.098 μm, which is smaller than 0.118 μm, the average of the standard deviation directly measured by CMM. The results verify that the proposed method can effectively improve the spatial coordinate accuracy of CMM. © 2017, Chinese Lasers Press. All right reserved.

关键词:

Coordinate measuring machines Electromagnetic wave attenuation Measurement Statistics Tracers

作者机构:

  • [ 1 ] [Chen, Hongfang]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Zheng, Bowen]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Shi, Zhaoyao]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Sun, Yanqiang]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [Long, Changyu]Beijing Satellite Environment Engineering Research Institute, Beijing; 100029, China
  • [ 6 ] [Yang, Zaihua]Beijing Satellite Environment Engineering Research Institute, Beijing; 100029, China

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2017

期: 3

卷: 44

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 9

ESI高被引论文在榜: 0 展开所有

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