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作者:

Zhou, Weiping (Zhou, Weiping.) | Wang, Shutong (Wang, Shutong.) | Yu, Yongchao (Yu, Yongchao.) | Zheng, Chong (Zheng, Chong.) | Li, Ruozhou (Li, Ruozhou.) | Hou, Tingxiu (Hou, Tingxiu.) | Bai, Shi (Bai, Shi.) | Ma, Delong (Ma, Delong.) | Feng, Guoying (Feng, Guoying.) | Hu, Anming (Hu, Anming.)

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摘要:

Femtosecond laser has been widely used in elaborate processing and micro/nano manufacturing field due to its ultrashort pulse width and extremely high peak intensity. At present, the fabrication of flexible devices by laser direct writing has attracted much attention. The following four research directions based on laser direct writing technology are reviewed: 1) laser direct writing microball lens for wide angle imaging; 2) laser fabrication of Au/reduced graphene oxide micro supercapacitor; 3) preparation of multilayer supercapacitor on polyimide substrate; 4) laser fabrication of capacitive biosensor. Relevant research work of our group is introduced at the same time. This paper provides a reference for the research, application and future direction of the micro/nano device fabrication by laser direct writing. © 2017, Chinese Lasers Press. All right reserved.

关键词:

Biosensors Fabrication Femtosecond lasers Gold compounds Graphene Nanostructures Optical instrument lenses Substrates Supercapacitor

作者机构:

  • [ 1 ] [Zhou, Weiping]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Wang, Shutong]Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville; TN; 37996, United States
  • [ 3 ] [Wang, Shutong]Institute of Laser & Micro/Nano Engineering, College of Electronics and Information Engineering, Sichuan University, Chengdu; Sichuan; 610064, China
  • [ 4 ] [Yu, Yongchao]Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville; TN; 37996, United States
  • [ 5 ] [Zheng, Chong]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 6 ] [Zheng, Chong]Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville; TN; 37996, United States
  • [ 7 ] [Zheng, Chong]Science and Technology on Optical Radiation Laboratory, Beijing; 100854, China
  • [ 8 ] [Li, Ruozhou]Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville; TN; 37996, United States
  • [ 9 ] [Hou, Tingxiu]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 10 ] [Bai, Shi]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 11 ] [Ma, Delong]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 12 ] [Feng, Guoying]Institute of Laser & Micro/Nano Engineering, College of Electronics and Information Engineering, Sichuan University, Chengdu; Sichuan; 610064, China
  • [ 13 ] [Hu, Anming]Institute of Laser Engineering, Beijing University of Technology, Beijing; 100124, China
  • [ 14 ] [Hu, Anming]Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville; TN; 37996, United States

通讯作者信息:

  • [hu, anming]institute of laser engineering, beijing university of technology, beijing; 100124, china;;[hu, anming]department of mechanical, aerospace and biomedical engineering, university of tennessee, knoxville; tn; 37996, united states

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2017

期: 1

卷: 44

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 7

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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