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作者:

Zhu, Yan-Xu (Zhu, Yan-Xu.) | Wang, Yue-Hua (Wang, Yue-Hua.) | Song, Hui-Hui (Song, Hui-Hui.) | Li, Lai-Long (Li, Lai-Long.) | Shi, Dong (Shi, Dong.)

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摘要:

The sensor elements based on GaN high electron mobility transistor (HEMT) have considerable advantages on sensitivity, response speed, detection surface, and harsh environment adaptability because of the features of HEMT, such as high 2DEG density at the hetero-interface, wide band gap, high breakdown voltage, stable chemical properties, and high electron mobility. In this paper, the structures, mechanism, progress of work, advantages and disadvantages about the two mature types of sensors developed from GaN-based HEMT basic structure are discussed and summarized firstly. Then, the latest progress on three kinds of nevel GaN-based HEMT sensors is reviewed in detail focusing on the device material and the optimization of gate structure and material. Among them, GaN-based HEMT photodetector is highlighted in the aspects of the material system, key process, detector structure, principle and new mechanisms. Finally, the future direction for the development of GaN-based HEMT sensor elements is explored. © 2016, Science Press. All right reserved.

关键词:

Aluminum gallium nitride Chemical detection Electron mobility Energy gap Gallium nitride Heterojunctions High electron mobility transistors III-V semiconductors Photodetectors Photons Structural optimization Two dimensional electron gas Wide band gap semiconductors

作者机构:

  • [ 1 ] [Zhu, Yan-Xu]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Wang, Yue-Hua]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Song, Hui-Hui]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Li, Lai-Long]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [Shi, Dong]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing; 100124, China

通讯作者信息:

  • [zhu, yan-xu]key laboratory of opto-electronics technology, ministry of education, beijing university of technology, beijing; 100124, china

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来源 :

Chinese Journal of Luminescence

ISSN: 1000-7032

年份: 2016

期: 12

卷: 37

页码: 1545-1553

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

万方被引频次:

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