Research　results　of　microlens　beam　shaping　and　homogenizing　optical　system　for　the　248　nm　excimer　laser　are　reported.　Through　the　actual　filming,　an　excimer　laser　light　energy　distribution　color　image　is　obtained.　Matlab　is　used　to　analyze　the　image　and　extract　relevant　information　to　calculate.　Then　an　actual　energy　distribution　of　excimer　laser　light　source　is　simulated　by　the　optical　software　ZEMAX.　According　to　the　characteristics　of　the　light　energy　spatial　distribution,　a　microlens　beam　shaping　and　homogenizing　optical　system　for　the　248　nm　excimer　laser　is　designed　and　fabricated.　The　experimental　results　are　in　good　agreement　with　the　theoretical　simulations.　After　the　shaping　and　homogenizing,　a　high　uniform　beam　spot　is　obtained　finally.　The　profile　of　this　spot　is　a　standard　square　with　a　size　of　18　mm　×18　mm.　The　energy　uniformity　error　(process　window)　of　the　beam　spot　is　less　than　±2%,　and　the　top-hat　factor　of　energy　distribution　is　about　0.90.　This　optical　system　can　transform　85%　of　the　total　input　beam　power　into　the　work　plane　of　output　beam.　The　spot　shape　of　original　excimer　laser　is　irregular,　and　the　energy　distribution　is　nonuniform.　This　technical　scheme　can　be　a　good　solution　to　these　problems.　The　successful　development　of　this　optical　system　has　independent　intellectual　property　rights,　and　also　provides　a　technical　support　for　the　excimer　laser　micromachining　with　high　quality　and　efficiency.　©,　2015,　Science　Press.　All　right　reserved.