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作者:

Tang, Yun (Tang, Yun.) | Wang, Lei (Wang, Lei.) | Cai, Xiaowu (Cai, Xiaowu.) | Hu, Dongqing (Hu, Dongqing.) | Dong, Bin (Dong, Bin.) | Ding, Liqiang (Ding, Liqiang.) | Gao, Yuexin (Gao, Yuexin.) | Xia, Ruirui (Xia, Ruirui.) | Gao, Mali (Gao, Mali.) | Wang, Shiping (Wang, Shiping.) | Dang, Jianying (Dang, Jianying.) | Zhao, Fazhan (Zhao, Fazhan.) | Li, Bo (Li, Bo.)

收录:

EI Scopus SCIE

摘要:

In this article, the synergistic effect of negative gate bias and radiation on SiC metal-oxide-semiconductor fieldeffect transistors (MOSFETs) is investigated. Under negative gate bias (-5, -10, and -15 V), a slight decrease in the threshold voltage (Vth) of non-irradiated SiC MOSFETs is observed. The variation of trapped-oxide charge (Not) and SiC/SiO2 interface trap charge ( Nit) can be obtained through the subthreshold swing and mid-gap voltage method. Although the Vth of non-irradiated SiC MOSFETs remains unchanged, significant increases in Nit and Not are observed due to the opposite effect of Not and Nit on Vth. This phenomenon is attributed to holes drifting to the interface and tunneling into the oxide layer under the negative gate bias. It is found through the Cg-Vgs characteristic curves that holes tunneling into the oxide layer are mostly from the channel region. For irradiated SiC MOSFETs, a large number of radiation-induced holes exist in the oxide layer above the channel region and JFET region, resulting in a decrease in Vth, which is mainly caused by an increase in Not.

关键词:

trapped-oxide charge Logic gates Interface trap charge subthreshold swing MOSFET mid-gap voltage method SiC metal-oxide-semiconductor field-effect transistor (MOSFET) Thermal variables control Radiation effects Silicon carbide Stress Threshold voltage negative bias

作者机构:

  • [ 1 ] [Tang, Yun]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 2 ] [Wang, Lei]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 3 ] [Cai, Xiaowu]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 4 ] [Ding, Liqiang]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 5 ] [Gao, Yuexin]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 6 ] [Xia, Ruirui]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 7 ] [Gao, Mali]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 8 ] [Wang, Shiping]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 9 ] [Dang, Jianying]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 10 ] [Zhao, Fazhan]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 11 ] [Li, Bo]Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
  • [ 12 ] [Tang, Yun]Univ Chinese Acad Sci, Beijing 100049, Peoples R China
  • [ 13 ] [Tang, Yun]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 14 ] [Wang, Lei]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 15 ] [Cai, Xiaowu]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 16 ] [Ding, Liqiang]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 17 ] [Gao, Yuexin]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 18 ] [Xia, Ruirui]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 19 ] [Gao, Mali]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 20 ] [Wang, Shiping]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 21 ] [Dang, Jianying]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 22 ] [Zhao, Fazhan]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 23 ] [Li, Bo]Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
  • [ 24 ] [Hu, Dongqing]Beijing Univ Technol, Coll Elect Informat & Control Engn, Power Semicond & Integrated Circuit Lab, Beijing 100124, Peoples R China
  • [ 25 ] [Dong, Bin]Guangdong Acad Sci, Inst Semicond, Guangzhou 510650, Peoples R China

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来源 :

IEEE TRANSACTIONS ON NUCLEAR SCIENCE

ISSN: 0018-9499

年份: 2023

期: 8

卷: 70

页码: 1990-1994

1 . 8 0 0

JCR@2022

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SCOPUS被引频次: 3

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