The　films　of　nanoscale-carbonare　is　formed　through　laser　exfoliation　of　graphite　on　the　substrate　silicon　(Si)　without　a　catalytic　layer　and　the　chamber　is　vacuumed　to　1.33×10-4　Pa　in　the　growth　process.　The　femtosecond　(fs)　laser　exfoliation　process　is　investigated　at　different　laser　fluences　and　deposition　time.　The　composition　of　the　carbon　films　deposited　at　different　pulse　energies　and　irradiation　time　are　detected　by　the　visible　Raman　spectroscopy.　Scanning　electron　microscope　(SEM)　and　atomic　force　microscope　are　used　to　display　the　surface　of　the　thin　films.　The　results　show　that　the　deposition　time　influences　ratio　of　ID/IG,　microstructure,　the　grain　size　of　the　carbon.　High-intensity　femtosecond　laser　pulse　energy　can　promote　the　crystallization　of　carbon　particles.　Some　special　particles　(pattern-snowflake-like,　cube　and　quadrangle),　which　are　formed　by　femtosecond　laser　pulse　ablates　a　graphite　at　a　high　laser　fluence,　particles　are　found　on　the　sample　surface.　©,　2015,　Science　Press.　All　right　reserved.