Surface　modification　of　powder　materials　has　always　been　a　key　issue　that　must　be　faced　to　improve　their　application　properties　and　application　value.　Herein,　an　efficient　and　eco-friendly　CH4/CF4　plasma　method　is　used　for　surface　modification　of　materials.　The　surface　modification　mechanism　of　fluorocarbon　plasma　under　different　gas　flow　ratios　was　detailed　investigated　by　combining　the　kinetic　analysis.　The　findings　demonstrate　that　fluorocarbon　plasma　exhibits　different　modification　mechanisms　under　different　modification　conditions.　The　physicochemical　properties　of　the　material　surface　can　be　easily　controlled　by　adjusting　the　ratio　of　fluorocarbon　plasma.　Functional　CaTiO3　particles　with　core-shell　structure　were　successfully　prepared　when　the　gas　flow　rate　ratio　R=3.　The　modified　surface　exhibited　extreme　hydrophobicity　and　the　lowest　surface　energy.　This　strong　application　of　fluorocarbon　plasma　technology　in　material　surface　modification　offers　a　new　avenue　to　prepare　environmentally　friendly　and　functional　powders.