To　advance　the　precision　of　the　robot　motion　is　one　significant　research　goal　of　robot　flexible　processing　issues.　In　the　process,　deformation　mechanism　of　heat　caused　by　temperature　variation　is　found　as　one　of　the　important　reasons　for　affect　the　positioning　error.　The　temperature　compensation　method　suitable　for　the　industry　field　was　presented　and　testified　through　this　paper.　Effect　of　robot　self-　heating　and　scene　environmental　temperature　factors　on　axial　motion　and　the　ending　actuator　positioning　accuracy　were　analyzed.　The　thermal　distribution　and　deformation　models　were　built　using　finite　element　theory.　Thermal　compensation　strategy　was　presented　to　accomplish　the　experimental　and　theoretical　analysis　of　significant　correlation　between　robot　kinematics　parameters　and　thermal　models　above,　especially　self-heating　effect.　It　was　convenient　and　suitable　for　industrial　field　environment.　Thermal　compensation　is　experimentally　proved　to　carry　the　ability　to　adjust　the　position　error　of　ending　actuator　to　less　than　0.1　mm.　©,　2015,　Chinese　Society　of　Astronautics.　All　right　reserved.