Hastelloy　C-276　alloy　is　the　preferred　substrate　for　YBa2Cu3O7-delta　(YBCO)　coated　conductors　prepared　by　Ionbeam-assisted　deposition　(IBAD)　route,　but　its　surface　is　too　rough　to　meet　application　requirements.　Y　(CH3COO)3　&　sdot;4H2O　precursor　solution　has　a　low　flattening　efficiency,　and　its　film　edges　are　prone　to　crack　formations.　In　this　paper,　a　model　for　the　stress　intensity　factor　was　established　to　study　the　effect　of　the　presence　of　cracks　on　film　stress.　The　simulation　results　showed　that　increasing　the　coating　thickness　reduced　the　overall　stress,　but　increased　the　stress　concentration　at　the　crack.　The　larger　bottom　layer　defects　also　made　it　easier　for　cracks　to　be　generated.　Then,　10-m　long　Hastelloy　C-276/Y2O3　strips　were　prepared　by　colloidal-solution　deposition　planarization　(CSDP),　with　an　average　surface　roughness　Rq　of　0.427　and　only　10　coating　layers.　This　improved　the　flattening　efficiency　by　40　%,　and　a　CeO2　layer　with　a　good　biaxial　texture　was　finally　prepared.