Water strategies and practices for sustainable development in the semiconductor industry - 文章详情页

作者：

Wang, Qi (Wang, Qi.) | Huang, Nan (Huang, Nan.) | Cai, Hanying (Cai, Hanying.) | Chen, Xiaowen (Chen, Xiaowen.) | Wu, Yinhu (Wu, Yinhu.)

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EI Scopus

摘要：

Semiconductor　manufacturing　is　a　rapidly　growing　industry　and　water-intensive　industry.　Water　strategy　formulation　and　decisions　can　be　crucial　factors　in　realizing　the　sustainable　development　of　the　semiconductor　industry.　This　study　surveyed　the　sustainability　reports　of　24　semiconductor　corporations　and　investigated　their　water　strategies　and　practices.　Water　targets　proposed　in　the　early　stage　of　the　21st　century　are　summarized.　Water　recycling,　reuse,　and　restoration　were　the　main　strategies.　Reverse　osmosis　played　a　dominant　role　in　water　treatment　and　reclamation.　Classified　wastewater　collection　and　separate　treatment　systems　have　contributed　greatly　to　improvement　of　water　recycling　rate　in　industrial　parks.　Finally,　a　future　water　cycle　system　for　semiconductor　manufacturing　parks　is　proposed,　which　comprises　water　source,　water　use　and　recycling,　and　water　discharge.　This　study　is　of　theoretical　and　practical　significance　for　the　formulation　and　implementation　of　water　strategies　in　the　semiconductor　industry　to　help　accomplish　its　sustainable　development　with　rapid　growth.　©　2022　The　Authors

关键词：

Semiconductor device manufacture Wastewater reclamation Water recycling Water conservation Sustainable development Water supply Wastewater treatment

作者机构：

[ 1 ] [Wang, Qi]Environmental Simulation and Pollution Control State Key Joint Laboratory, State Environmental Protection Key Laboratory of Microorganism Application and Risk Control (SMARC), School of Environment, Tsinghua University, Beijing; 100084, China
[ 2 ] [Huang, Nan]Department of Environmental Engineering, Faculty of Environment and Life, Beijing University of Technology, Beijing; 100124, China
[ 3 ] [Cai, Hanying]Key Laboratory of Microorganism Application and Risk Control of Shenzhen, Guangdong Provincial Engineering Research Center for Urban Water Recycling and Environmental Safety, Institute of Environment and Ecology, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen; 518055, China
[ 4 ] [Chen, Xiaowen]Environmental Simulation and Pollution Control State Key Joint Laboratory, State Environmental Protection Key Laboratory of Microorganism Application and Risk Control (SMARC), School of Environment, Tsinghua University, Beijing; 100084, China
[ 5 ] [Wu, Yinhu]Environmental Simulation and Pollution Control State Key Joint Laboratory, State Environmental Protection Key Laboratory of Microorganism Application and Risk Control (SMARC), School of Environment, Tsinghua University, Beijing; 100084, China
[ 6 ] [Wu, Yinhu]Beijing Laboratory for Environmental Frontier Technologies, Beijing; 100084, China

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