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摘要:
In this paper, a novel SiC superjunction metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated MOS junction barrier Schottky diode (MJBS) is proposed, in which the n-pillar is directly connected to the source electrode to form a Schottky contact at the top, and a part of polycrystalline silicon is connected to the source electrode by inserting an oxide layer in the centre of the trench gate to form a split gate and a body diode is in the on state to form a MOS channel electron accumulation layer, electrons can easily flow from the n-pillar into the source contact, and the turn-on voltage Vth is reduced by 61. 3% compared to a superjunction MOSFET that only forms a Schottky contact, which further reduces the static loss of the built-in diode when it conducts. The conduction of the Schottky diode during reverse recovery is enhanced. As a result, the hole injection efficiency of the body diode can be reduced, thereby lowering the reverse recovery charge (Q(rr)) and further suppressing reverse recovery oscillations. Compared with the parasitic body diode, the unipolar conduction generated by the channel diode effectively optimises the reverse recovery performance and switching characteristics, and the simulation results show that the reverse recovery charge (Q(rr)) and peak reverse recovery current (I-rrm) of the proposed SJ MOSFETs are reduced by about 74.9% and 69.7%, respectively, and the total switching energy loss ESW is reduced by 73.6%.
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来源 :
PROCEEDINGS OF 2023 7TH INTERNATIONAL CONFERENCE ON ELECTRONIC INFORMATION TECHNOLOGY AND COMPUTER ENGINEERING, EITCE 2023
年份: 2023
页码: 1601-1608
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