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作者:

Li, Teng (Li, Teng.) | Zhang, Meng (Zhang, Meng.) | Yu, Jingjing (Yu, Jingjing.) | Cui, Jiawei (Cui, Jiawei.) | Yang, Junjie (Yang, Junjie.) | Wu, Yanlin (Wu, Yanlin.) | Yang, Han (Yang, Han.) | Zhang, Yamin (Zhang, Yamin.) | Yang, Xuelin (Yang, Xuelin.) | Wang, Maojun (Wang, Maojun.) | Feng, Shiwei (Feng, Shiwei.) | Shen, Bo (Shen, Bo.) | Wei, Jin (Wei, Jin.)

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CPCI-S EI Scopus

摘要:

There is a strong motivation to develop E-mode p-channel field-effect transistor (p-FET) on the E-mode p-GaN gate HEMT (EPH) platform to enable complementary logic (CL) circuits and power integrated circuits (PICs). However, the p-FET on such platform often presents a low current density (1-5 mA/mm). A major cause is the low ionization rate of acceptors in p-GaN. This work demonstrates a polarization engineering technique that aims to enhance the ionization of acceptors in p-GaN layer. By inserting a thin AlN layer (similar to 1.5 nm) into the p-GaN, the polarization field of AlN pushes down the energy band of the lower p-GaN layer, leading to enhanced ionization of acceptors. The AlN layer also creates an energy well above AlN for holes, resulting in modulation doping effect and enhanced two-dimensional hole gas (2DHG) above AlN. The fabricated p-FET with LG = 2 mu m exhibits a n E-mode operation with V-th = -0.8 V. A low R-ON of 1.1 k ohm center dot mm is obtained. The I-ON/I-OFF is over 106. The Imax is 10.8 mA/mm, which is among the largest values in literature for E-mode GaN p-FETs on the EPH platform. Finally, an E-mode n-channel p-GaN gate HEMT is demonstrated on the same epitaxial wafer, validating the capability of the platform for CL and PICs.

关键词:

ionization enhancement E-mode polarization engineering 2DHG GaN p-FET current density

作者机构:

  • [ 1 ] [Li, Teng]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 2 ] [Yu, Jingjing]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 3 ] [Cui, Jiawei]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 4 ] [Yang, Junjie]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 5 ] [Wu, Yanlin]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 6 ] [Wang, Maojun]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 7 ] [Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 8 ] [Li, Teng]Beijing Univ Technol, Coll Microelect, Beijing, Peoples R China
  • [ 9 ] [Zhang, Meng]Beijing Univ Technol, Coll Microelect, Beijing, Peoples R China
  • [ 10 ] [Zhang, Yamin]Beijing Univ Technol, Coll Microelect, Beijing, Peoples R China
  • [ 11 ] [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Beijing, Peoples R China
  • [ 12 ] [Yang, Han]Peking Univ, Sch Phys, Beijing, Peoples R China
  • [ 13 ] [Yang, Xuelin]Peking Univ, Sch Phys, Beijing, Peoples R China
  • [ 14 ] [Shen, Bo]Peking Univ, Sch Phys, Beijing, Peoples R China

通讯作者信息:

  • [Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China;;[Zhang, Meng]Beijing Univ Technol, Coll Microelect, Beijing, Peoples R China;;

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来源 :

2024 36TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND IC S, ISPSD 2024

ISSN: 1063-6854

年份: 2024

页码: 160-163

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SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

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