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作者:

Yang, Junjie (Yang, Junjie.) | Yu, Jingjing (Yu, Jingjing.) | Wu, Yanlin (Wu, Yanlin.) | Cui, Jiawei (Cui, Jiawei.) | Yang, Han (Yang, Han.) | Yang, Xuelin (Yang, Xuelin.) | Zhang, Meng (Zhang, Meng.) | Shen, Bo (Shen, Bo.) | Wang, Maojun (Wang, Maojun.) | Wei, Jin (Wei, Jin.)

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CPCI-S EI Scopus

摘要:

The dynamic R-ON performance of GaN power devices is reported to degrade after hot-electron stress, due to the generation of new traps. In this study, the p-GaN gate HEMTs with active passivation and virtual body (AP/VB-HEMTs) are proposed to address hot-electron induced dynamic degradation. The active passivation is a thinned p-GaN layer that extends from the gate towards the drain. The virtual body is a hole channel above a buried AlGaN layer, and is formed by holes injected from gate. As a result, the surface trapping caused by pre-existing and hot-electron generated traps are screened by the active passivation. The buffer traps are suppressed by the mobile holes in virtual body. To evaluate the effectiveness on suppressing hot-electron induced dynamic R-ON degradation, the devices are evaluated after hot-electron stress with different stress time and stress current. After a 30-min hot-electron stress, the AP/VB-HEMT shows negligible dynamic R-ON increase, presenting a contrast to the severe degradation in conventional p-GaN gate HEMT, suggesting the enhanced suppressions against hot-electron stress in the AP/VB-HEMT.

关键词:

virtual body dynamic R-ON active passivation p-GaN gate HEMT hot electron

作者机构:

  • [ 1 ] [Yang, Junjie]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 2 ] [Yu, Jingjing]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 3 ] [Wu, Yanlin]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 4 ] [Cui, Jiawei]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 5 ] [Wang, Maojun]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 6 ] [Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China
  • [ 7 ] [Yang, Han]Peking Univ, Sch Phys, Beijing, Peoples R China
  • [ 8 ] [Yang, Xuelin]Peking Univ, Sch Phys, Beijing, Peoples R China
  • [ 9 ] [Shen, Bo]Peking Univ, Sch Phys, Beijing, Peoples R China
  • [ 10 ] [Zhang, Meng]Beijing Univ Technol, Fac Informat Technol, Beijing, Peoples R China

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来源 :

2024 36TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND IC S, ISPSD 2024

ISSN: 1063-6854

年份: 2024

页码: 530-533

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SCOPUS被引频次: 1

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