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作者:

Huang, Jidong (Huang, Jidong.) | Meng, Junhua (Meng, Junhua.) (学者:孟军华) | Yang, Huabo (Yang, Huabo.) | Jiang, Ji (Jiang, Ji.) | Xia, Zhengchang (Xia, Zhengchang.) | Zhang, Siyu (Zhang, Siyu.) | Zeng, Libin (Zeng, Libin.) | Yin, Zhigang (Yin, Zhigang.) | Zhang, Xingwang (Zhang, Xingwang.)

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Scopus SCIE

摘要:

Van der Waals (vdW) heterostructures comprising of transition metal dichalcogenides (TMDs) and hexagonal boron nitride (h-BN) are promising building blocks for novel 2D devices. The vdW epitaxy provides a straightforward integration method for fabricating high-quality TMDs/h-BN vertical heterostructures. In this work, the vdW epitaxy of high-quality single-crystal HfSe2 on epitaxial h-BN/sapphire substrates by chemical vapor deposition is demonstrated. The epitaxial HfSe2 layers exhibit a uniform and atomically sharp interface with the underlying h-BN template, and the epitaxial relationship between HfSe2 and h-BN/sapphire is determined to HfSe2 (0001)[12${\mathrm{\bar{2}}}$10]//h-BN (0001)[11${\mathrm{\bar{1}}}$00]//sapphire (0001)[11${\mathrm{\bar{1}}}$00]. Impressively, the full width at half maximum of the rocking curve for the epitaxial HfSe2 layer on single-crystal h-BN is as narrow as 9.6 arcmin, indicating an extremely high degree of out-plane orientation and high crystallinity. Benefitting from the high crystalline quality of HfSe2 epilayers and the weak interfacial scattering of HfSe2/h-BN, the photodetector fabricated from the vdW epitaxial HfSe2 on single-crystal h-BN shows the best performance with an on/off ratio of 1 x 104 and a responsivity up to 43 mA W-1. Furthermore, the vdW epitaxy of other TMDs such as HfS2, ZrS2, and ZrSe2 is also experimentally demonstrated on single-crystal h-BN, suggesting the broad applicability of the h-BN template for the vdW epitaxy. Several high-quality single-crystalline transition metal dichalcogenides are directly grown on an epitaxial h-BN/sapphire substrate via vdW epitaxy, indicating the h-BN is an ideal template for vdW epitaxy. The full width at half maximum of the X-ray diffraction rocking curve for the HfSe2 layers on single-crystal h-BN is only 9.6 arcmin, indicating an extremely high degree of out-plane orientation and high crystallinity. image

关键词:

XRD rocking curve hexagonal boron nitride van der Waals epitaxy transition metal dichalcogenides heterostructures

作者机构:

  • [ 1 ] [Huang, Jidong]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 2 ] [Yang, Huabo]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 3 ] [Jiang, Ji]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 4 ] [Xia, Zhengchang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 5 ] [Zhang, Siyu]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 6 ] [Zeng, Libin]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 7 ] [Yin, Zhigang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 8 ] [Zhang, Xingwang]Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
  • [ 9 ] [Huang, Jidong]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 10 ] [Yang, Huabo]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 11 ] [Jiang, Ji]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 12 ] [Xia, Zhengchang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 13 ] [Zhang, Siyu]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 14 ] [Zeng, Libin]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 15 ] [Yin, Zhigang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 16 ] [Zhang, Xingwang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 17 ] [Meng, Junhua]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China

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来源 :

SMALL METHODS

ISSN: 2366-9608

年份: 2024

1 2 . 4 0 0

JCR@2022

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