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作者:

Zhao, Yu (Zhao, Yu.) | Li, Qingyue (Li, Qingyue.) | Doucet, Jean-Baptiste (Doucet, Jean-Baptiste.) | Calmon, Pierre-Francois (Calmon, Pierre-Francois.) | Mesnilgrente, Fabien (Mesnilgrente, Fabien.) | Reig, Benjamin (Reig, Benjamin.) | Tronche, Clement (Tronche, Clement.) | Camps, Thierry (Camps, Thierry.) | Perchoux, Julien (Perchoux, Julien.) | Bardinal, Veronique (Bardinal, Veronique.)

收录:

Scopus SCIE

摘要:

Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 mu m x 200 mu m x 150 mu m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

关键词:

technology micro-nano laser beam shaping integrated microoptics VCSEL microfluidic doppler laser sensing

作者机构:

  • [ 1 ] [Zhao, Yu]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 2 ] [Li, Qingyue]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 3 ] [Doucet, Jean-Baptiste]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 4 ] [Calmon, Pierre-Francois]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 5 ] [Mesnilgrente, Fabien]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 6 ] [Reig, Benjamin]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 7 ] [Tronche, Clement]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 8 ] [Camps, Thierry]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 9 ] [Perchoux, Julien]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 10 ] [Bardinal, Veronique]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France
  • [ 11 ] [Zhao, Yu]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 12 ] [Zhao, Yu]Beijing Engn Res Ctr Laser Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • [Bardinal, Veronique]Univ Toulouse, CNRS, LAAS, INP,UPS, F-31400 Toulouse, France

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来源 :

APPLIED SCIENCES-BASEL

年份: 2019

期: 24

卷: 9

2 . 7 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:136

JCR分区:2

被引次数:

WoS核心集被引频次: 5

SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

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