With　the　development　of　micro/nano　satellites　and　formation　flying,　more　advanced　spatial　propulsion　technology　is　required.　In　this　paper,　a　review　of　microthrusters　developments　that　based　on　micro　electromechanical　systems　(MEMS)　technology　adopted　in　microthrusters　is　summarized.　The　microthrusters　in　previous　research　are　classified　and　summarized　according　to　the　types　of　propellants　and　the　working　principles　they　utilized.　The　structure　and　the　performance　including　the　thrust,　the　impulse　and　the　specific　impulse　of　various　microthrusters　are　compared.　In　addition,　the　advantages　and　the　disadvantages　of　these　microthrusters　presented　in　the　paper　are　discussed.