Investigation on 532 nm picosecond laser processing of quartz glass - 文章详情页

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In　this　paper,　picosecond　laser　drilling　of　quartz　glass　is　studied.　The　532　nm　picosecond　laser　induced　ablation　threshold　of　quartz　glass　is　explored　and　the　basic　parameters　of　the　picosecond　laser　processing　of　glass,　including　the　laser　power,　repetition　rate　and　processing　time,　are　investigated.　From　the　study,　the　ablation　threshold　of　quartz　glass　at　picosecond　pulse　width　is　concluded　to　be　around　2.01　J/cm2.　It　is　found　that　the　diameter　and　depth　of　the　holes　drilled　in　quartz　glass　are　proportional　to　the　laser　fluence　and　processing　time,　but　the　rate　of　increase　levels　off　finally.　Meanwhile　the　laser　repetition　rate　also　has　an　important　influence　on　the　machining　quality.　Picosecond　laser　crack-free　processing　of　quartz　glass　is　achieved　by　optimizing　the　laser　parameters　based　on　the　ablation　threshold　and　the　processing　rules　obtained　in　our　research.

关键词：

Quartz Micromachining Picosecond lasers Glass Laser beam effects Ablation Infill drilling

作者机构：

[ 1 ] [Hu, Yan]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Ji, Lingfei]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Li, Jian]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Bao, Yong]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Yan, Yinzhou]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
[ 6 ] [Jiang, Yijian]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

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ncltji@bjut.edu.cn

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