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We report high-speed large-area silicon photodetectors (PDs) that were fabricated on silicon-on-insulator (SOI) substrates. These coplanar interdigital PDs were fabricated with finger spacing in the 0.5- 5\mu \text{m} range. One of the detectors, which had an area of 2300\mu \text{m}<^>{{2}} , achieved a bandwidth as high as 14.1 GHz under a bias voltage of -10 V at a wavelength of 850 nm. Meanwhile, the device with the maximum area of 4300\mu \text{m}<^>{{2}} also achieved a 7.9-GHz bandwidth, suggesting our detectors are highly suitable for high-speed 850-nm optical receiver and, especially, for large area receiving applications. We established a new transition time and resistor-capacitor (RC) equivalent circuit model to analyze and calculate the 3-dB frequency of the coplanar interdigital PD; the model results were well-matched with the measurement results.
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