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作者:

Qin, Shihong (Qin, Shihong.) | Li, Chong (Li, Chong.) | Li, Ben (Li, Ben.) | Bao, Kai (Bao, Kai.) | Su, Jiale (Su, Jiale.)

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EI Scopus SCIE

摘要:

We report high-speed large-area silicon photodetectors (PDs) that were fabricated on silicon-on-insulator (SOI) substrates. These coplanar interdigital PDs were fabricated with finger spacing in the 0.5- 5\mu \text{m} range. One of the detectors, which had an area of 2300\mu \text{m}<^>{{2}} , achieved a bandwidth as high as 14.1 GHz under a bias voltage of -10 V at a wavelength of 850 nm. Meanwhile, the device with the maximum area of 4300\mu \text{m}<^>{{2}} also achieved a 7.9-GHz bandwidth, suggesting our detectors are highly suitable for high-speed 850-nm optical receiver and, especially, for large area receiving applications. We established a new transition time and resistor-capacitor (RC) equivalent circuit model to analyze and calculate the 3-dB frequency of the coplanar interdigital PD; the model results were well-matched with the measurement results.

关键词:

High-speed photodetector (PD) silicon large area

作者机构:

  • [ 1 ] [Qin, Shihong]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China
  • [ 2 ] [Li, Chong]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Ben]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China
  • [ 4 ] [Bao, Kai]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China
  • [ 5 ] [Su, Jiale]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China

通讯作者信息:

  • [Li, Chong]Beijing Univ Technol, Inst Sch Informat, Beijing 100124, Peoples R China

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来源 :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

年份: 2019

期: 12

卷: 66

页码: 5187-5190

3 . 1 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:136

JCR分区:2

被引次数:

WoS核心集被引频次: 4

SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

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