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作者:

Chen, Xiang (Chen, Xiang.) | Xing, Yanhui (Xing, Yanhui.) | Han, Jun (Han, Jun.) | Li, Yingzhi (Li, Yingzhi.) | Deng, Xuguang (Deng, Xuguang.) | Fan, Yaming (Fan, Yaming.) | Zhang, Xiaodong (Zhang, Xiaodong.) | Zhang, Baoshun (Zhang, Baoshun.)

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摘要:

AlGaN/AlN/GaN high electron mobility transistors (HEMT) structures with AlN interfacial layer of various thicknesses are grown by metalorganic chemical vaper deposition, and their electrical properties are investigated. The HEMT sample with an AlN layer thickness of about 1.5 nm shows a highly Hall mobility of 1680 cm2/Vs with a low sheet resistance of 310 Ω, and high two-dimensional electron gas (2DEG) density of 1.2×1013 cm-2 are obtained at room temperature, indicating good electrical properties of the HEMT material. Furthermore, the results from atomic force microscopy and high resolution X-ray diffraction measurements confirm that the samples possess well surface morphology and heterostructure interface. Thence, the well heterostructure interface enhances the 2DEG density and mobility of the HEMT materials.

关键词:

Aluminum gallium nitride Aluminum nitride Atomic force microscopy Carrier mobility Density of gases Electric properties Electron mobility Electrons Hall mobility High electron mobility transistors III-V semiconductors Materials Morphology Surface morphology Two dimensional electron gas X ray diffraction analysis

作者机构:

  • [ 1 ] [Chen, Xiang]Key Laboratory of Opto-Electronics Technology, College of Electronic Information and Control Engineer, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Xing, Yanhui]Key Laboratory of Opto-Electronics Technology, College of Electronic Information and Control Engineer, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Han, Jun]Key Laboratory of Opto-Electronics Technology, College of Electronic Information and Control Engineer, Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Li, Yingzhi]Key Laboratory of Opto-Electronics Technology, College of Electronic Information and Control Engineer, Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Deng, Xuguang]Key Laboratory of Opto-Electronics Technology, College of Electronic Information and Control Engineer, Beijing University of Technology, Beijing 100124, China
  • [ 6 ] [Fan, Yaming]Suzhou Institute of Nano-Technology and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China
  • [ 7 ] [Zhang, Xiaodong]Suzhou Institute of Nano-Technology and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China
  • [ 8 ] [Zhang, Baoshun]Suzhou Institute of Nano-Technology and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2013

期: 6

卷: 40

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 5

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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