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摘要:
To measure complex geometries without nominal mathematics models, a 'form-free measurement mode' is introduced, and its basic requirements for measuring machine are analyzed. A fixed column structure coordinate measuring machine with high accuracy and efficiency was designed based on the novel mode. The machine is driven by linear motors, and high accuracy gratings are used as measurement devices. To decrease the influence of workpiece weight, a closed aerostatic bearing with vacuum preload and an H style two dimensional co-planar structure are designed. A pneumatic cylinder balanced axis Z assembly with brake function is designed, and a vibration isolation assembly is also designed. The measurement span of the machine is 300 mm×300 mm×300 mm and the measurement uncertainty is 1.8 μm. It can be applied to measure complex geometries without nominal mathematics models.
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来源 :
Chinese Journal of Scientific Instrument
ISSN: 0254-3087
年份: 2012
期: 6
卷: 33
页码: 1377-1384
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