Effect of substrate temperature on the structure and properties of Cu2O thin films - 文章详情页

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摘要：

The　Cu2O　thin　films　were　deposited　by　radio-frequency(RF)　magnetron　sputtering　at　different　substrate　temperatures.　The　effect　of　substrate　temperature　on　the　crystal　structure,　optical　and　electrical　properties　were　studied.　The　X-ray　diffraction　patterns　show　that　the　single-phase　Cu2O　was　obtained　and　present　a　preferred　growth　orientation　(111)　as　the　substrate　temperatures　increased　from　500　K　to　800　K.　The　room　temperature　conductivity　and　optotical　bandgap(Eg)　increase　as　the　substrate　temperature　increasing.　The　biggest　Eg,　2.58　eV,　is　achieved　for　the　sample　prepared　at　800　K.

关键词：

Electric properties Thin films Substrates Electric conductivity X ray diffraction

作者机构：

[ 1 ] [Dong, Guo-Bo]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 2 ] [Zhang, Ming]College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Wang, Mei]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 4 ] [Li, Ying-Zi]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 5 ] [Li, Chao-Rong]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 6 ] [Li, Hua]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 7 ] [Huang, An-Ping]School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China
[ 8 ] [Yan, Hui]College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China

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wavedong@buaa.edu.cn

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