Three-dimensional imaging for micro-optical component by using dual-wavelength digital holography - 文章详情页

作者：

Wang, Yujia (Wang, Yujia.) | Jiang, Zhuqing (Jiang, Zhuqing.) (学者：江竹青) | Wang, Zhe (Wang, Zhe.) | Cheng, Guofeng (Cheng, Guofeng.) | Wu, Jiangtao (Wu, Jiangtao.)

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EI Scopus PKU CSCD

摘要：

The　three-dimensional　(3D)　profiles　of　a　plate　with　many　micro　grooves　is　obtained　by　using　dual-wavelength　digital　holography.　Two　individual　phase　images　are　obtained　by　using　two　different　wavelengths,　respectively,　and　the　phase　image　for　beat　wavelength　is　obtained　after　dual-wavelength　phase　unwrapping.　Then　the　3D　profiles　can　be　obtained　through　the　phase　image　of　the　beat　wavelength.　This　method　is　demonstrated　by　both　numerical　simulation　and　experiment.　In　the　experiment,　two　lasers　of　the　different　wavelengths　632.8　nm　and　671　nm　are　used　to　obtain　a　larger　beat　wavelength.　The　object　is　a　plate　with　many　micro　grooves.　The　result　shows　that　the　average　depth　of　the　groove　is　7.1　μm.　This　is　in　good　agreement　with　the　result　given　by　the　profilometer.　It　demonstrates　that　the　3D　imaging　result　by　using　dual-wavelength　digital　holography　is　effective.

关键词：

Imaging systems Numerical methods Holography

作者机构：

[ 1 ] [Wang, Yujia]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Wang, Yujia]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Jiang, Zhuqing]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Jiang, Zhuqing]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Wang, Zhe]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 6 ] [Wang, Zhe]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
[ 7 ] [Cheng, Guofeng]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 8 ] [Cheng, Guofeng]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
[ 9 ] [Wu, Jiangtao]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 10 ] [Wu, Jiangtao]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China

通讯作者信息：

电子邮件地址：

zhuqjiang@bjut.edu.cn

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